Author(s)

Pingping Jia

Corresponding Author

Pingping Jia

Abstract

Laser interferometer has become the benchmark for linear measurement and compensation of precision machine tools. This paper takes the linear measurement of Renishaw ML10 laser interferometer as an example. Starting from the measurement principle of laser interferometer, the relationship between measurement distance and wavelength and pulse number is obtained. . The influence of environmental factors on measurement factors is described. The calculation formulas for positioning accuracy and repeat positioning accuracy are pointed out for specific linear measurements. And pointed out the problems that should be paid attention to during the measurement process.

Keywords

Laser Interferometer, Linear Measurement, Wavelength, Compensation, Positioning Accuracy