Author(s)

Hui Chai, Caiqi Li, Wei Long

Corresponding Author

Hui Chai

Abstract

When the aerostatic bearing working gas film is at the micron-scale, the pressure distribution in the gas film has a significant temperature sensitivity, which seriously affects the loading capacity and stiffness characteristics of the bearings system. Based on the theory of gas lubrication and rarefied gas dynamics, combined with boundary slip and gas-solid thermal coupling analysis technology, this paper studies the local deformation of aerostatic bearing caused by temperature influence by numerical analysis method, and theoretically analyses and experimentally studies the loading capacity and stiffness characteristics of the bearing system.

Keywords

Aerostatic Bearing, Micro-Scale Gas Film, Gas-Solid Thermal Coupling, Loading Characteristics