Author(s)

Lirong Wang

Corresponding Author

Lirong Wang

Abstract

Surface photovoltage (SPV) is an online monitoring technology with high sensitivity and non-destructive characteristics. It can accurately measure the minority carrier diffusion length and lifetime of semiconductor wafers, heavy metal contamination concentration and other parameters. It plays an important role in the online monitoring of IC oxide layer and oxidation furnace tube, and is also an important detection method to ensure the quality of IC production. As the integrated circuit continues to evolve, the requirements for online contamination monitoring technology are constantly increasing. The most common impurities in the IC manufacturing process are heavy metals, which have a severe impact on the quality of the oxide layer and reduce the reliability and yield of the associated device. By applying SPV, relevant samples can be quickly tested and monitored online, which is widely used in the research and production of integrated circuits. In this paper, the surface photovoltage is analyzed and its application in the online monitoring of IC oxide layer and oxidation furnace tube is discussed.

Keywords

Surface photovoltage; IC oxide layer; oxidation furnace tube; online monitoring; application